|
|
|
|
| LEADER |
01644nam a2200325 a 4500 |
| 005 |
20130713153453.0 |
| 008 |
891212s1990 nyua b 101 0 eng |
| 010 |
|
|
|a 89082431
|
| 040 |
|
|
|a DLC
|c DLC
|b hrv
|d HR-ZaFER
|e ppiak
|
| 050 |
0 |
0 |
|a TK153
|b .M468 1990
|
| 082 |
0 |
0 |
|a 621.3
|2 20
|
| 245 |
0 |
0 |
|a Micro electro mechanical systems :
|b an investigation of micro structures, sensors, actuators, machines, and robots : proceedings /
|c IEEE, Napa Valley, California, 11-14, February 1990 ; sponsored by the IEEE Robotics and Automation Society, and in cooperation with the ASME Dynamic Systems and Control Division.
|
| 260 |
|
|
|a New York, NY :
|b IEEE,
|c c1990.
|
| 300 |
|
|
|a XIII, 226 str. :
|b ilustr. ;
|c 28 cm.
|
| 500 |
|
|
|a Papers presented at the third IEEE Workshop on Micro Electro Mechanical Systems.
|
| 500 |
|
|
|a "IEEE catalog number 90CH2832-4."
|
| 500 |
|
|
|a Title on spine: IEEE micro electro mechanical systems workshop.
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Electromechanical devices
|x Congresses.
|
| 650 |
|
0 |
|a Miniature objects
|x Congresses.
|
| 650 |
|
0 |
|a Microelectronics
|x Congresses.
|
| 650 |
|
0 |
|a Robotics
|x Congresses.
|
| 710 |
2 |
|
|a IEEE Robotics and Automation Society.
|
| 710 |
2 |
|
|a American Society of Mechanical Engineers.
|b Dynamic Systems and Control Division.
|
| 711 |
2 |
|
|a IEEE Workshop on Micro Electro Mechanical Systems
|n (3rd :
|d 1990 :
|c Napa Valley, Calif.)
|
| 740 |
0 |
|
|a IEEE micro electro mechanical systems workshop.
|
| 906 |
|
|
|a 7
|b cbc
|c orignew
|d 2
|e opcn
|f 19
|g y-gencatlg
|
| 942 |
|
|
|2 udc
|c K
|
| 955 |
|
|
|a bx57 to bd00 08-08-90; bd03 08-15-90; fg11 08-22-90
|
| 999 |
|
|
|c 35526
|d 35526
|
