Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings - IEEE Robotics and Automation Society; American Society of Mechanical Engineers. Dynamic Systems and Control Division; IEEE Workshop on Micro Electro Mechanical Systems 1990 : Napa Valley, Calif.) (New York, NY : IEEE, 1990)
Papers presented at the third IEEE Workshop on Micro Electro Mechanical Systems.
"IEEE catalog number 90CH2832-4."
Title on spine: IEEE micro electro mechanical systems workshop.
Includes bibliographical references and indexes.
Keywords: Electromechanical devices -- Congresses; Miniature objects -- Congresses; Microelectronics -- Congresses; Robotics -- Congresses