Plasma etching

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Ostali autori: Manos, Dennis M. (Editor)
Vrsta građe: Knjiga
Jezik: eng
Impresum: Boston [etc.] : Academic Press, [1989].
Nakladnička cjelina: Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm
Predmet:
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008 900508s1989 -usa |||||||||||||eng d
020 |a 0124693709 
035 |z 797 
040 |a HR-ZaIRB  |b hrv  |c HR-ZaIRB  |e ppiak 
080 |a 533.9 
245 0 0 |a Plasma etching :  |b an introduction /  |c edited by Dennis M. Manos, Daniel L. Flamm. 
260 |a Boston [etc.] :   |b Academic Press,   |c [1989]. 
300 |a XII, 476 str. :   |b ilustr. ;   |c 24 cm. 
490 1 |a Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm 
504 |a includes index. 
653 |a materials interactions 
700 1 |4 edt  |a Manos, Dennis M. 
830 0 |a Plasma-Materials Interactions / A Series edited by Orlando Auciello, Daniel L. Flamm 
942 |c BOOK 
960 |a Radić, Nikola  |c Mladost 21422463 
999 |c 583  |d 583