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|a 0931837596
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|z 242
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|a 621.382
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| 111 |
2 |
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|4 aut
|a Rapid thermal processing of electronic materials.
|c Anaheim, Ca., USA)
|d (21-23 April 1987. ;
|e symposium
|
| 245 |
1 |
0 |
|a Rapid thermal processing of electronic materials /
|c editors Syd R. Wilson, Ronald Powell, D. Eirug Davies.
|
| 260 |
|
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|a Pittsburgh, Penn. :
|b Materials Research Society,
|c [1987].
|
| 300 |
|
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|a xvii, 485 str. :
|b ilustr. ;
|c 24 cm.
|
| 490 |
1 |
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|a Materials Research Society Symposia Proc. ;
|v vol. 92
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| 653 |
|
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|a semiconductor doping
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| 700 |
1 |
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|4 edt
|a Wilson, Syd R.
|
| 830 |
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0 |
|a Materials Research Society Symposia Proc. ;
|v vol. 92
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| 942 |
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|c BOOK
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| 960 |
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|a Pivac, Branko
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| 999 |
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|c 196
|d 196
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