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|a HR-ZaIRB
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|e ppiak
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|a 621.382
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| 111 |
2 |
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|4 aut
|a Materials Issues in Silicon Integrated Circuit processing.
|c Palo Alto)
|d (1986 ;
|e symposium
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| 245 |
1 |
0 |
|a Materials issues in silicon integrated circuit processing :
|b Symposium held April 15-18, 1986, Palo Alto, California, USA /
|c editors Marc Wittmer, James Stimmell, Michael Strathman.
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| 260 |
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|a Pittsburgh :
|b Materials Research Society,
|c [1986].
|
| 300 |
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|a xvii, 535 str. :
|b ilustr. ;
|c 24 cm.
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| 490 |
1 |
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|a Materials Research Society Symposia Proc. ;
|v vol.71
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| 653 |
|
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|a microelectronics
|a materials
|a semiconductors
|
| 700 |
1 |
|
|4 edt
|a Wittmer, Marc
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| 700 |
1 |
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|4 edt
|a Stimmell, james
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| 700 |
1 |
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|4 edt
|a Stratham, Michael
|
| 830 |
|
0 |
|a Materials Research Society Symposia Proc. ;
|v vol.71
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| 942 |
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|
|c BOOK
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| 960 |
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|a Pivac, Branko
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| 999 |
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|c 194
|d 194
|