Introductory MEMS
| Permalink: | http://skupnikatalog.nsk.hr/Record/fer.KOHA-OAI-FER:50689/TOC |
|---|---|
| Glavni autor: | Adams, Thomas M. (-) |
| Ostali autori: | Layton, Richard A. (Mechanical engineer) (-) |
| Vrsta građe: | Knjiga |
| Jezik: | eng |
| Impresum: |
New York :
Springer,
2010.
|
| Predmet: |
Sadržaj:
- 1. Introduction
- 2. The substrate and adding material to it
- 3. Creating and transferring patterns- photolithography
- 4. Creating structures - micromachining
- 5. Solid mechanics
- 6. Thinking about modeling
- 7. MEMS transducers
- 8. Piezoresistive transducers
- 9. Capacitive transducers
- 10. Piezoelectric transducers
- 11. Thermal transducers
- 12. Introduction to microfluidics
- 13. Microfabrication laboratories.