Thermal decomposition of silicon-rich oxides deposited by the LPCVD method - Ristić, Davor; Ivanda, Mile, inženjer fizike; Furić, Krešimir; Chiasera, Alessandro; Moser, Enrico; Ferrari, Maurizio (2012)
34th International Convention on Information and Communication Technology, Electronics and Microelectronics, Opatija, May 23-27, 2011
Bibliografija: 13 jed.
Keywords: Silicij -- Oksidi -- Toplinska razgradnja -- Termogravimetrija -- Tanki filmovi